Identification of phosphorus in diamond thin films using electron paramagnetic-resonance spectroscopy

Academic Article


  • An electron paramagnetic-resonance study of diamond films doped by implantation of phosphorus during film deposition is reported. Samples with nominal phosphorus concentration between 1016 and 1017 cm-3 exhibit two isotropic lines of equal intensity separated by 27 G. The double-line spectrum is expected for a nuclear-spin 1/2 species such as phosphorus. The symmetry of the center and the temperature dependence of the spin concentration suggest that phosphorus forms a substitutional shallow donor in diamond. © 1994 American Institute of Physics.
  • Authors

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    Digital Object Identifier (doi)

    Author List

  • Zvanut ME; Carlos WE; Freitas JA; Jamison KD; Hellmer RP
  • Start Page

  • 2287
  • End Page

  • 2289
  • Volume

  • 65
  • Issue

  • 18