Microfluidic-packaged CMOS chemiresistor detector for micro-scale gas chromatograph

Academic Article

Abstract

  • The implementation of a microfluidic 'detector cell' is presented, which integrates a nanofabricated chemiresistor (CR) array with monolithic CMOS baseline cancellation circuitry and a microfluidic chamber for use in a micro-scale gas chromatograph (μGC). A robust packaging method was developed to facilitate a microfluidic interface between the detector cell and external μGC components while also reducing dead volume and the sorbence of sample vapours. The efficacy of the integrated detector cell was elucidated by consistent chip responses taken from a 4×2 CR array fabricated on the silicon dioxide surface of a custom-designed CMOS readout chip. © 2012 The Institution of Engineering and Technology.
  • Published In

    Digital Object Identifier (doi)

    Author List

  • Ward N; Mu X; Serrano G; Covington E; Kurdak C; Zellers ET; Mason AJ; Li W
  • Start Page

  • 721
  • End Page

  • 724
  • Volume

  • 7
  • Issue

  • 8