Effect of confinement and temperature on the initial hole trapping efficiency of buried oxide films

Academic Article


  • Vacuum ultraviolet hole injection was used to study the initial trapping properties of three different types of buried oxides, SIMOX, Unibond, and polySi/SiO2/Si samples. After accounting for the charge centroid, the initial hole trapping efficiency for SIMOX samples is shown to be at least a factor of four greater than that measured for Unibond buried oxides. We suggest that the difference is due to the post fabrication anneal temperature and the lack of moisture in the ambient during the anneal.
  • Authors

    Published In

    Digital Object Identifier (doi)

    Author List

  • Zvanut ME; Chun W; Stahlbush RE
  • Start Page

  • 347
  • End Page

  • 350
  • Volume

  • 48
  • Issue

  • 1