Electrical erosion pulsed plasma accelerators for preparing diamond-like carbon coatings

Academic Article

Abstract

  • Theoretical and practical aspects of the condensation of pulsed vacuum arc discharge plasma were considered. Problems connected with designing plasma accelerators for the preparation of diamond-like carbon films are discussed. Primary attention is paid to the problems of achieving pulsed accelerations with long service life and to ensuring the stability of the processes involved in the formation of diamond-like carbon coatings. Some operating parameters of the developed equipment are given and the prospects of the deposition method are discussed in terms of the production of carbon films for different applications. © 1991.
  • Digital Object Identifier (doi)

    Author List

  • Tochitsky EI; Selifanov OV; Akulich VV; Kapustin IA; Stanishevskii AV
  • Start Page

  • 522
  • End Page

  • 527
  • Volume

  • 47
  • Issue

  • 1-3