Scaling of ferroelectric and piezoelectric properties in Pt/SrBi2Ta2O9/Pt thin films

Academic Article

Abstract

  • Scaling of the ferroelectric and piezoelectric properties in Pt/SrBi2Ta2O9/Pt thin films was studied. Focused ion beam milling was used to fabricate submicron devices (1 × 1, 0.5 × 0.5, 0.25 × 0.25, 0.09 × 0.09, and 0.07 × 0.07 μm2) and scanning force microscopy was used to examine their piezoelectric response. It was found that capacitors as small as 0.09 × 0.09 μm2 exhibit good piezoelectric/ferroelectric properties and that submicron (0.25 × 0.25 μm2) capacitors show resistance to bipolar fatigue with up to at least 109 cycles. The results were compared with similar capacitor structures milled in the Pb1.0(Nb0.04Zr0.28Ti0.68)O 3 system where structures as small as 0.07 × 0.07 μm2 were analyzed. © 1999 American Institute of Physics.
  • Digital Object Identifier (doi)

    Author List

  • Ganpule CS; Stanishevsky A; Aggarwal S; Melngailis J; Williams E; Ramesh R; Joshi V; Paz De Araujo C
  • Start Page

  • 3874
  • End Page

  • 3876
  • Volume

  • 75
  • Issue

  • 24