Pt and W ohmic contacts to p-6H-SiC by focused ion beam direct-write deposition

Academic Article


  • Low resistance Pt and W ohmic metallizations to p-type 6H-SiC, using focused ion beam (FIB) surface-modification and in-situ direct-write metal deposition without annealing, are reported. FIB(Ga) surface-modification and in-situ deposition of Pt, and W showed minimum contact resistance values of 2.8×10-4 ohm-cm2 to 2.5×10-4 ohm-cm2, respectively. A comparison with ex-situ pulse laser deposited Pt on surface-modified areas showed comparable contact resistance values and similar behavior. Auger and secondary ion mass spectroscopy analysis showed a significant (approximately 4% a.c.) incorporation of Ga within a 15 nm distance from the SiC surface with surface-modification. Atomic force microscopy studies showed that surface-modification process smooths out the SiC surface significantly.
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    Author List

  • Iliadis AA; Andronescu SN; Yang W; Vispute RD; Stanishevsky A; Orloff JH; Sharma RP; Venkatesan T; Wood MC; Jones KA
  • Start Page

  • 136
  • End Page

  • 140
  • Volume

  • 28
  • Issue

  • 3