Comparison of the surface structure of carbon films deposited by different methods

Academic Article

Abstract

  • Atomic force microscopy is used to estimate and compare surface morphology of the carbon coatings, prepared using radio frequency plasma chemical vapor deposition, pulsed cathodic arc discharge, ion-beam deposition and hot-filament chemical vapor deposition. The difference in the surface structure was mentioned for each method of deposition. The influence of the surface morphology on the film properties is discussed. © 1997 Elsevier Science S.A.
  • Author List

  • Niedzielski P; Mitura E; Mitura S; Dluzniewski M; Przymusiala P; Der Sahaguian S; Staryga E; Zak J; Sokolowska A; Szmidt J
  • Start Page

  • 721
  • End Page

  • 724
  • Volume

  • 6
  • Issue

  • 5-7