Radiation damage and its recovery in focused ion beam fabricated ferroelectric capacitors

Academic Article

Abstract

  • We studied the effect of ion damage on the properties of 50 keV Ga + focused ion beam fabricated lead-zirconate-titanate capacitors as a function of the ion dose. We observed significant modification in the chemical composition of the damaged layer due to loss of lead and oxygen, and gallium impurity accumulation. The 5-10 nm thick damaged layer becomes dielectric after annealing and does not recover its ferroelectric properties. This dielectric layer substantially reduces the actual volume of the ferroelectric material in sub-100 nm structures, and can affect their performance. © 2002 American Institute of Physics.
  • Published In

    Digital Object Identifier (doi)

    Author List

  • Stanishevsky A; Nagaraj B; Melngailis J; Ramesh R; Khriachtchev L; McDaniel E
  • Start Page

  • 3275
  • End Page

  • 3278
  • Volume

  • 92
  • Issue

  • 6