Effect of nitrogen addition on the morphology and structure of boron-doped nanostructured diamond films

Academic Article


  • A chemical vapor deposition hydrogen/methane/nitrogen feedgas mixture with unconventional high methane normally used to grow ultrahard and smooth nanostructured diamond films on Ti-6Al-4V alloy substrates was modified to include diborane for boron doping. Flow rates were varied. It was found that nitrogen addition could significantly reduce the incorporation of boron in the film and influence the film crystallinity and film mechanical properties.
  • Published In

    Digital Object Identifier (doi)

    Author List

  • Liang Q; Catledge SA; Vohra YK
  • Start Page

  • 5047
  • End Page

  • 5049
  • Volume

  • 83
  • Issue

  • 24