Synthesis and characterization of boron-doped single crystal diamond

Academic Article

Abstract

  • The boron-doped single crystal diamond films were grown homoepitaxially on synthetic (100) oriented Type Ib diamond substrates using a Microwave Plasma Chemical Vapor Deposition (MPCVD) technique. Raman spectrum showed a few additional bands at the lower wavenumber regions along with the zone center optical phonon mode for diamond. The change in the peak profile of the zone center optical phonon mode and its downshift were observed with the increasing boron content in the film. A modification in surface morphology of the film with increasing boron content had been observed by atomic force microscopy. Four point probe electrical measurement indicated that different conduction mechanisms are operating in various temperature regions for these semiconducting films. © 2013 Materials Research Society.
  • Authors

    Published In

    Digital Object Identifier (doi)

    Author List

  • Karna SK; Martyshkin DV; Vohra YK; Weir ST
  • Start Page

  • 87
  • End Page

  • 92
  • Volume

  • 1519